Efficiency improvement of PERC solar cell using an aluminum oxide passivation layer prepared via spatial atomic layer deposition and post-annealing

Published 2018 View Full Article

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Title
Efficiency improvement of PERC solar cell using an aluminum oxide passivation layer prepared via spatial atomic layer deposition and post-annealing
Authors
Keywords
Spatial atomic layer deposition, Post annealing, Aluminum oxide, Passivation, Passivated emitter and rear contact solar cell
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 358, Issue -, Pages 968-975
Publisher
Elsevier BV
Online
2018-12-06
DOI
10.1016/j.surfcoat.2018.12.016

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