Local epitaxial-like templating effects and grain size distribution in atomic layer deposited Hf0.5Zr0.5O2 thin film ferroelectric capacitors
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Title
Local epitaxial-like templating effects and grain size distribution in atomic layer deposited Hf0.5Zr0.5O2 thin film ferroelectric capacitors
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 119, Issue 9, Pages 092901
Publisher
AIP Publishing
Online
2021-08-30
DOI
10.1063/5.0057782
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