Impacts of surface nitridation on crystalline ferroelectric phase of Hf1-xZrxO2 and ferroelectric FET performance
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Title
Impacts of surface nitridation on crystalline ferroelectric phase of Hf1-xZrxO2 and ferroelectric FET performance
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 119, Issue 19, Pages 192102
Publisher
AIP Publishing
Online
2021-11-09
DOI
10.1063/5.0062475
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