Interlayer-Engineered Local Epitaxial Templating Induced Enhancement in Polarization (2Pr > 70 μC/cm2) in Hf0.5Zr0.5O2 Thin Films

标题
Interlayer-Engineered Local Epitaxial Templating Induced Enhancement in Polarization (2Pr > 70 μC/cm2) in Hf0.5Zr0.5O2 Thin Films
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 70, Issue 7, Pages 3536-3541
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2023-05-30
DOI
10.1109/ted.2023.3277804

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