Enhanced ferroelectric polarization with less wake-up effect and improved endurance of Hf0.5Zr0.5O2 thin films by implementing W electrode
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Title
Enhanced ferroelectric polarization with less wake-up effect and improved endurance of Hf0.5Zr0.5O2 thin films by implementing W electrode
Authors
Keywords
Hf, 0.5, Zr, 0.5, O, 2, films, Ferroelectric polarization, Endurance properties, Thermal expansion coefficient, W electrode
Journal
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
Volume 104, Issue -, Pages 1-7
Publisher
Elsevier BV
Online
2021-09-09
DOI
10.1016/j.jmst.2021.07.016
References
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Related references
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