The Importance of Decarbonylation Mechanisms in the Atomic Layer Deposition of High‐Quality Ru Films by Zero‐Oxidation State Ru(DMBD)(CO) 3
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Title
The Importance of Decarbonylation Mechanisms in the Atomic Layer Deposition of High‐Quality Ru Films by Zero‐Oxidation State Ru(DMBD)(CO)
3
Authors
Keywords
-
Journal
Small
Volume -, Issue -, Pages 2105513
Publisher
Wiley
Online
2022-01-06
DOI
10.1002/smll.202105513
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