Growth of thin films of molybdenum oxide by atomic layer deposition

Title
Growth of thin films of molybdenum oxide by atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 21, Issue 3, Pages 705-710
Publisher
Royal Society of Chemistry (RSC)
Online
2010-11-01
DOI
10.1039/c0jm01099e

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