Thermal Atomic Layer Deposition (ALD) of Ru Films for Cu Direct Plating

Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition

(2010) Seong Keun Kim et al.   CHEMISTRY OF MATERIALS

Nonvolatile memory characteristics of atomic layer deposited Ru nanocrystals with a SiO2/Al2O3 bilayered tunnel barrier

(2010) Do-Joong Lee et al.   JOURNAL OF APPLIED PHYSICS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Large-Scale Synthesis of Few-Layered Graphene using CVD

(2009) Xianbao Wang et al.   CHEMICAL VAPOR DEPOSITION

Low Temperature Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and O[sub 2]

(2009) Tae-Kwang Eom et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Chemical Vapor Deposition of Ru Thin Films with an Enhanced Morphology, Thermal Stability, and Electrical Properties Using a RuO4Precursor

(2008) Jeong Hwan Han et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application

(2008) Sung-Soo Yim et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Formation of Ru Nanotubes by Atomic Layer Deposition onto an Anodized Aluminum Oxide Template

(2008) Do-Joong Lee et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Nucleation kinetics of Ru on silicon oxide and silicon nitride surfaces deposited by atomic layer deposition

(2008) Sung-Soo Yim et al.   JOURNAL OF APPLIED PHYSICS

Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition

(2008) Woo-Hee Kim et al.   NANOTECHNOLOGY

Applications of atomic layer deposition to nanofabrication and emerging nanodevices

(2008) Hyungjun Kim et al.   THIN SOLID FILMS

Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode

(2007) Sang-Joon Park et al.   MICROELECTRONIC ENGINEERING