Novel chemical route for atomic layer deposition of MoS2 thin film on SiO2/Si substrate
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Title
Novel chemical route for atomic layer deposition of MoS2 thin film on SiO2/Si substrate
Authors
Keywords
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Journal
Nanoscale
Volume 6, Issue 23, Pages 14453-14458
Publisher
Royal Society of Chemistry (RSC)
Online
2014-10-14
DOI
10.1039/c4nr04816d
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