Quantifying the Extent of Ligand Incorporation and the Effect on Properties of TiO2 Thin Films Grown by Atomic Layer Deposition Using an Alkoxide or an Alkylamide

Title
Quantifying the Extent of Ligand Incorporation and the Effect on Properties of TiO2 Thin Films Grown by Atomic Layer Deposition Using an Alkoxide or an Alkylamide
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 32, Issue 4, Pages 1393-1407
Publisher
American Chemical Society (ACS)
Online
2020-01-24
DOI
10.1021/acs.chemmater.9b03621

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