Chemical-mechanical polishing performance of core-shell structured polystyrene@ceria/nanodiamond ternary abrasives on sapphire wafer

Chemical mechanical polishing for sapphire wafers using a developed slurry

(2021) Zhenyu Zhang et al.   Journal of Manufacturing Processes

Novel rotary chemical mechanical polishing on an integral impeller

(2021) Longxing Liao et al.   Journal of Manufacturing Processes

A novel slurry for chemical mechanical polishing of single crystal diamond

(2021) Longxing Liao et al.   APPLIED SURFACE SCIENCE

Photocatalytic degradation of bisphenol A using titanium dioxide@nanodiamond composites under UV light illumination

(2020) Y.M. Hunge et al.   JOURNAL OF COLLOID AND INTERFACE SCIENCE

Novel polyelectrolyte–Al2O3/SiO2 composite nanoabrasives for improved chemical mechanical polishing (CMP) of sapphire

(2019) Tianxian Wang et al.   JOURNAL OF MATERIALS RESEARCH

Nanocomposite Synthesis of Nanodiamond and Molybdenum Disulfide

(2019) Youngjun Kim et al.   Nanomaterials

Synthesis of porous Mg-doped CeO2 powders via self-propagating high-temperature synthesis route

(2019) Zahra Hashemzaei et al.   ADVANCED POWDER TECHNOLOGY

Effects of process parameters on chemical-mechanical interactions during sapphire polishing

(2019) Wenhu Xu et al.   MICROELECTRONIC ENGINEERING

Development of a novel chemical mechanical polishing slurry and its polishing mechanisms on a nickel alloy

(2019) Zhenyu Zhang et al.   APPLIED SURFACE SCIENCE

Preparation of SiC/SiO2 Hard Core–Soft Shell Abrasive and Its CMP Behavior on Sapphire Substrate

(2019) Sanwei Dai et al.   JOURNAL OF ELECTRONIC MATERIALS

Synthesis of Sm-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing performances on sapphire substrates

(2019) Hong Lei et al.   MATERIALS CHEMISTRY AND PHYSICS

Preparation of MgO doped colloidal SiO 2 abrasive and their chemical mechanical polishing performance on c-, r- and a-plane sapphire substrate

(2018) Da Yin et al.   CERAMICS INTERNATIONAL

Preparation of non-spherical silica composite abrasives by lanthanum ion-induced effect and its chemical–mechanical polishing properties on sapphire substrates

(2018) Yue Dong et al.   JOURNAL OF MATERIALS SCIENCE

Environment friendly chemical mechanical polishing of copper

(2018) Zhenyu Zhang et al.   APPLIED SURFACE SCIENCE

Photocatalysis assisting the mechanical polishing of a single-crystal SiC wafer utilizing an anatase TiO 2 -coated diamond abrasive

(2017) Jing Lu et al.   PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

CMP behavior of alumina/metatitanic acid core–shell abrasives on sapphire substrates

(2017) Xin Wang et al.   PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

Study on Chemical Mechanical Polishing Performances of Sapphire Wafer (0001) Using Silica-Based Slurry

(2017) Zefang Zhang et al.   ECS Journal of Solid State Science and Technology

Influence of loading rate on nanohardness of sapphire

(2016) Manjima Bhattacharya et al.   CERAMICS INTERNATIONAL

World׳s largest sapphire for many applications

(2016) Chandra P. Khattak et al.   JOURNAL OF CRYSTAL GROWTH

Synthesis of Zn-doped colloidal SiO2 abrasives and their applications in sapphire chemical mechanical polishing slurry

(2016) Hong Lei et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates

(2016) Hong Lei et al.   MATERIALS CHEMISTRY AND PHYSICS

Preparation of Ni-Doped Colloidal Silica Abrasives and Their Chemical Mechanical Polishing Performances on Sapphire

(2016) Pan Ma et al.   ECS Journal of Solid State Science and Technology

A novel approach of chemical mechanical polishing for cadmium zinc telluride wafers

(2016) Zhenyu Zhang et al.   Scientific Reports

Fe-Nx/C assisted chemical–mechanical polishing for improving the removal rate of sapphire

(2015) Li Xu et al.   APPLIED SURFACE SCIENCE

Chemical Mechanical Polishing for SiO2 Film Using Polystyrene@ceria (PS@CeO2) Core–Shell Nanocomposites

(2015) Ailian Chen et al.   Journal of Inorganic and Organometallic Polymers and Materials

Core/shell composites with polystyrene cores and meso-silica shells as abrasives for improved chemical mechanical polishing behavior

(2015) Yang Chen et al.   JOURNAL OF NANOPARTICLE RESEARCH

Polymethylmethacrylate (PMMA)/CeO 2 hybrid particles for enhanced chemical mechanical polishing performance

(2015) Yang Chen et al.   TRIBOLOGY INTERNATIONAL

Effects of ultra-smooth surface atomic step morphology on chemical mechanical polishing (CMP) performances of sapphire and SiC wafers

(2015) Yan Zhou et al.   TRIBOLOGY INTERNATIONAL

Synergetic effect of organic cores and inorganic shells for core/shell structured composite abrasives for chemical mechanical planarization

(2014) Yang Chen et al.   APPLIED SURFACE SCIENCE

A new approach for the one-step synthesis of bioactive PS vs. PMMA silica hybrid microspheres as potential drug delivery systems

(2014) A. Angelopoulou et al.   COLLOIDS AND SURFACES B-BIOINTERFACES

XPS studies on the interaction of CeO2 with silicon in magnetron sputtered CeO2 thin films on Si and Si3N4 substrates

(2013) C. Anandan et al.   APPLIED SURFACE SCIENCE

Plasticity and fracture of sapphire at room temperature: Load-controlled microcompression of four different orientations

(2013) Alex Montagne et al.   CERAMICS INTERNATIONAL

CeOx/Al2O3 thin films on stainless steel substrate — Dynamical X-ray photoelectron spectroscopy investigations

(2013) Ivalina Avramova et al.   THIN SOLID FILMS

Formation of core/shell structured polystyrene/anatase TiO2 photocatalyst via vapor phase hydrolysis

(2012) Fuzhi Shi et al.   APPLIED CATALYSIS B-ENVIRONMENTAL

Preparation and Characterization of Polystyrene Microspheres in the Presence of β-Cyclodextrin

(2012) Wei Wang et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Macroscopic and Microscopic Investigation on Chemical Mechanical Polishing of Sapphire Wafer

(2012) Hyunseop Lee et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Mechanism of the interaction between Al2O3 and SiO2 during the chemical-mechanical polishing of sapphire with silicon dioxide

(2012) E. A. Vovk et al.   Journal of Surface Investigation-X-Ray Synchrotron and Neutron Techniques

Polishing behavior of PS/CeO2 hybrid microspheres with controlled shell thickness on silicon dioxide CMP

(2011) Yang Chen et al.   APPLIED SURFACE SCIENCE

Preparation of monodisperse polystyrene/silica core–shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

(2011) Lei Zhang et al.   APPLIED SURFACE SCIENCE

Preparation and characterization of polystyrene/Ag core–shell microspheres – A bio-inspired poly(dopamine) approach

(2011) Wencai Wang et al.   JOURNAL OF COLLOID AND INTERFACE SCIENCE

Cross-linked polystyrene microspheres as density-reducing agent in drilling fluid

(2011) Xinyan Wang et al.   JOURNAL OF PETROLEUM SCIENCE AND ENGINEERING

Preparation of copper-incorporated mesoporous alumina abrasive and its CMP behavior on hard disk substrate

(2011) Hong Lei et al.   POWDER TECHNOLOGY

Optimization of cryo-XPS analyses for the study of thin films of a block copolymer (PS-PEO)

(2011) Marie F. Delcroix et al.   SURFACE AND INTERFACE ANALYSIS

Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate

(2010) Zefang Zhang et al.   APPLIED SURFACE SCIENCE

Preparation, characterization and oxide CMP performance of composite polystyrene-core ceria-shell abrasives

(2010) Yang Chen et al.   MICROELECTRONIC ENGINEERING

Preparation, Characterization of CeO2-ZrO2Composite Hollow Microspheres and Their Application as Electrocatalysis Materials for Hemoglobin in Biosensor

(2009) Feng Gao et al.   JOURNAL OF DISPERSION SCIENCE AND TECHNOLOGY

Hydrothermal synthesis of monodisperse CeO2 nanocubes

(2009) Zhijie Yang et al.   MATERIALS LETTERS

Synthesis, characterization of CeO2@SiO2 nanoparticles and their oxide CMP behavior

(2009) Xiaobing Zhao et al.   MICROELECTRONIC ENGINEERING

Synthesis, Characterization, and Antibacterial Action of Hollow Ceria Nanospheres with/without a Conductive Polymer Coating

(2008) Ioannis A. Kartsonakis et al.   JOURNAL OF THE AMERICAN CERAMIC SOCIETY