Fe-Nx/C assisted chemical–mechanical polishing for improving the removal rate of sapphire

Published 2015 View Full Article

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Title
Fe-Nx/C assisted chemical–mechanical polishing for improving the removal rate of sapphire
Authors
Keywords
Sapphire, Catalyst-assisted chemical–mechanical polishing, Non-noble metal catalyst, Material removal rate, Step-terrace structure
Journal
APPLIED SURFACE SCIENCE
Volume 343, Issue -, Pages 115-120
Publisher
Elsevier BV
Online
2015-03-15
DOI
10.1016/j.apsusc.2015.03.041

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