Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates

Published 2016 View Full Article

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Title
Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates
Authors
Keywords
Composite materials, Chemical synthesis, Surfaces, X-ray photo-emission spectroscopy (XPS)
Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 172, Issue -, Pages 26-31
Publisher
Elsevier BV
Online
2016-01-06
DOI
10.1016/j.matchemphys.2015.12.026

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