A novel slurry for chemical mechanical polishing of single crystal diamond
Published 2021 View Full Article
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Title
A novel slurry for chemical mechanical polishing of single crystal diamond
Authors
Keywords
Single crystal diamond, Chemical mechanical polishing, Slurry, Surface roughness
Journal
APPLIED SURFACE SCIENCE
Volume 564, Issue -, Pages 150431
Publisher
Elsevier BV
Online
2021-06-22
DOI
10.1016/j.apsusc.2021.150431
References
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