Novel polyelectrolyte–Al2O3/SiO2 composite nanoabrasives for improved chemical mechanical polishing (CMP) of sapphire
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Title
Novel polyelectrolyte–Al2O3/SiO2 composite nanoabrasives for improved chemical mechanical polishing (CMP) of sapphire
Authors
Keywords
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Journal
JOURNAL OF MATERIALS RESEARCH
Volume -, Issue -, Pages 1-10
Publisher
Cambridge University Press (CUP)
Online
2019-01-03
DOI
10.1557/jmr.2018.443
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