Chemical Mechanical Polishing for SiO2 Film Using Polystyrene@ceria (PS@CeO2) Core–Shell Nanocomposites

Electro-chemical mechanical polishing of single-crystal SiC using CeO 2 slurry

(2015) Hui Deng et al.   ELECTROCHEMISTRY COMMUNICATIONS

Chemical mechanical polishing in the dry lubrication regime: Application to conductive polysilicon

(2015) H. Pirayesh et al.   JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

Atomic force microscopy indentation to determine mechanical property for polystyrene–silica core–shell hybrid particles with controlled shell thickness

(2015) Yang Chen et al.   THIN SOLID FILMS

Polymethylmethacrylate (PMMA)/CeO 2 hybrid particles for enhanced chemical mechanical polishing performance

(2015) Yang Chen et al.   TRIBOLOGY INTERNATIONAL

Shape-Tunable Core–Shell Microparticles

(2014) Matthias K. Klein et al.   LANGMUIR

Advanced soap-free emulsion polymerization for highly pure, micron-sized, monodisperse polymer particles

(2014) Kazuhiro Shibuya et al.   POLYMER

Compressive elastic moduli and polishing performance of non-rigid core/shell structured PS/SiO2 composite abrasives evaluated by AFM

(2013) Ailian Chen et al.   APPLIED SURFACE SCIENCE

Mechanical properties of nanoparticles: basics and applications

(2013) Dan Guo et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Young’s modulus of PS/CeO2 composite with core/shell structure microspheres measured using atomic force microscopy

(2012) Yang Chen et al.   JOURNAL OF NANOPARTICLE RESEARCH

Models of nanoparticles movement, collision, and friction in chemical mechanical polishing (CMP)

(2012) Filip Ilie   JOURNAL OF NANOPARTICLE RESEARCH

Synthesis of Polystyrene/Polysilsesquioxane Core/Shell Composite Particles via Emulsion Polymerization in the Existence of Poly(γ-Methacryloxypropyl trimethoxysilane) Sol

(2012) Shenglin Yang et al.   LANGMUIR

Polishing behavior of PS/CeO2 hybrid microspheres with controlled shell thickness on silicon dioxide CMP

(2011) Yang Chen et al.   APPLIED SURFACE SCIENCE

Preparation of monodisperse polystyrene/silica core–shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

(2011) Lei Zhang et al.   APPLIED SURFACE SCIENCE

Facile Low-Temperature Synthesis of Ceria and Samarium-Doped Ceria Nanoparticles and Catalytic Allylic Oxidation of Cyclohexene

(2011) Narottam Sutradhar et al.   Journal of Physical Chemistry C

An investigation of the effect of sodium dodecyl sulfate on quasi-emulsifier-free emulsion polymerization for highly monodisperse polystyrene nanospheres

(2010) Hu Zhenxing et al.   EUROPEAN POLYMER JOURNAL

Preparation of Core/Shell and Hollow Nanostructures of Cerium Oxide by Electrodeposition on a Polystyrene Sphere Template

(2009) Ippei Yamaguchi et al.   ACS Applied Materials & Interfaces

Engineering Polymer Core–Silica Shell Size in the Composite Abrasives for CMP Applications

(2008) S. Armini et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Composite Polymer Core–Ceria Shell Abrasive Particles during Oxide CMP: A Defectivity Study

(2008) S. Armini et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY