Preparation of MgO doped colloidal SiO 2 abrasive and their chemical mechanical polishing performance on c-, r- and a-plane sapphire substrate

Published 2018 View Full Article

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Title
Preparation of MgO doped colloidal SiO 2 abrasive and their chemical mechanical polishing performance on c-, r- and a-plane sapphire substrate
Authors
Keywords
-
Journal
CERAMICS INTERNATIONAL
Volume 44, Issue 12, Pages 14631-14637
Publisher
Elsevier BV
Online
2018-05-13
DOI
10.1016/j.ceramint.2018.05.087

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