Macroscopic and Microscopic Investigation on Chemical Mechanical Polishing of Sapphire Wafer

Published 2012 View Full Article

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Title
Macroscopic and Microscopic Investigation on Chemical Mechanical Polishing of Sapphire Wafer
Authors
Keywords
-
Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 12, Issue 2, Pages 1256-1259
Publisher
American Scientific Publishers
Online
2012-04-16
DOI
10.1166/jnn.2012.4679

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