Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate

Published 2010 View Full Article

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Title
Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 12, Pages 3856-3861
Publisher
Elsevier BV
Online
2010-01-25
DOI
10.1016/j.apsusc.2010.01.040

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