Sputter deposition of WNx thin films by helicon-wave-excited argon plasma with N2 seeding

Microstructures and properties of novel nanocomposite WNx coatings deposited by reactive magnetron sputtering

(2020) Yang Deng et al.   APPLIED SURFACE SCIENCE

Fabrication of tungsten nitride thin films by superimposed HiPIMS and MF system: Effects of nitrogen flow rate

(2020) Bih-Show Lou et al.   SURFACE & COATINGS TECHNOLOGY

Effect of Nitrogen Addition on Electron Density and Temperature of Cascaded Arc Argon Discharge Plasma Diagnosed by Laser Thomson Scattering

(2019) Yong Wang et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Deposition of thermally stable tungsten nitride thin films by reactive magnetron sputtering

(2019) A.H. Abdelhameed et al.   SURFACE & COATINGS TECHNOLOGY

Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering

(2017) X.X. Zhang et al.   JOURNAL OF NUCLEAR MATERIALS

Extraordinary Indentation Strain Stiffening Produces Superhard Tungsten Nitrides

(2017) Cheng Lu et al.   PHYSICAL REVIEW LETTERS

One-Step Synthesis of Silicon Oxynitride Films Using a Steady-State and High-Flux Helicon-Wave Excited Nitrogen Plasma

(2017) Tianyuan Huang et al.   PLASMA CHEMISTRY AND PLASMA PROCESSING

Plasma detachment in linear devices

(2017) N Ohno   PLASMA PHYSICS AND CONTROLLED FUSION

Topologically close-packed phases: Deposition and formation mechanism of metastable β-W in thin films

(2016) Jiaxing Liu et al.   ACTA MATERIALIA

The Development of the Material Plasma Exposure Experiment

(2016) Juergen Rapp et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

High magnetic field helicon plasma discharge for plasma-wall interaction studies

(2016) TianYuan Huang et al.   Science China-Physics Mechanics & Astronomy

Cubic β -WN x layers: Growth and properties vs N-to-W ratio

(2016) B.D. Ozsdolay et al.   SURFACE & COATINGS TECHNOLOGY

Thermal stability studies of tungsten nitride thin films

(2016) Shahid Anwar et al.   SURFACE ENGINEERING

Deuterium retention in tungsten films after different heat treatments

(2015) P. Wang et al.   JOURNAL OF NUCLEAR MATERIALS

Interaction of deuterium plasma with sputter-deposited tungsten nitride films

(2015) L. Gao et al.   NUCLEAR FUSION

Epitaxial growth and properties of cubic WN on MgO(001), MgO(111), and Al 2 O 3 (0001)

(2015) B.D. Ozsdolay et al.   THIN SOLID FILMS

Deuterium implantation into tungsten nitride: Negligible diffusion at 300K

(2014) L. Gao et al.   JOURNAL OF NUCLEAR MATERIALS

Overview on plasma operation with a full tungsten wall in ASDEX Upgrade

(2013) R. Neu et al.   JOURNAL OF NUCLEAR MATERIALS

First nitrogen-seeding experiments in JET with the ITER-like Wall

(2013) M. Oberkofler et al.   JOURNAL OF NUCLEAR MATERIALS

Design and characterization of the Magnetized Plasma Interaction Experiment (MAGPIE): a new source for plasma–material interaction studies

(2012) Boyd D Blackwell et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Sputtering yields for low-energy Ar+- and Ne+-ion bombardment

(2012) Z. Somogyvári et al.   VACUUM

Deposition of tungsten nitride thin films by plasma focus device at different axial and angular positions

(2011) M.T. Hosseinnejad et al.   APPLIED SURFACE SCIENCE

Sputtering of tungsten by N+and N2+ions: investigations of molecular effects

(2011) K Dobes et al.   PHYSICA SCRIPTA

Quantification of the deuterium ion fluxes from a plasma source

(2011) A Manhard et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Nitrogen and neon retention in plasma-facing materials

(2010) M. Rubel et al.   JOURNAL OF NUCLEAR MATERIALS

Interaction of nitrogen plasmas with tungsten

(2010) K. Schmid et al.   NUCLEAR FUSION

Divertor power load feedback with nitrogen seeding in ASDEX Upgrade

(2010) A Kallenbach et al.   PLASMA PHYSICS AND CONTROLLED FUSION

Growth, stress and hardness of reactively sputtered tungsten nitride thin films

(2010) M. Wen et al.   SURFACE & COATINGS TECHNOLOGY

Structure, mechanical properties and tribology of W–N and W–O coatings

(2009) T. Polcar et al.   INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS

Characterization of sputtered tungsten nitride film and its application to Cu electroless plating

(2007) Zenglin Wang et al.   MICROELECTRONIC ENGINEERING