Sputtering yields for low-energy Ar+- and Ne+-ion bombardment

Published 2012 View Full Article

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Title
Sputtering yields for low-energy Ar+- and Ne+-ion bombardment
Authors
Keywords
-
Journal
VACUUM
Volume 86, Issue 12, Pages 1979-1982
Publisher
Elsevier BV
Online
2012-04-03
DOI
10.1016/j.vacuum.2012.03.055

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