Sputtering of tungsten by N+and N2+ions: investigations of molecular effects

Published 2011 View Full Article

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Title
Sputtering of tungsten by N+and N2+ions: investigations of molecular effects
Authors
Keywords
-
Journal
PHYSICA SCRIPTA
Volume T145, Issue -, Pages 014017
Publisher
IOP Publishing
Online
2011-12-16
DOI
10.1088/0031-8949/2011/t145/014017

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