Cubic β -WN x layers: Growth and properties vs N-to-W ratio

Title
Cubic β -WN x layers: Growth and properties vs N-to-W ratio
Authors
Keywords
Tungsten nitride, Cubic, Nitrogen vacancy, Hardness, Density functional calculations, Lattice constant
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 304, Issue -, Pages 98-107
Publisher
Elsevier BV
Online
2016-07-02
DOI
10.1016/j.surfcoat.2016.06.079

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