Sputter deposition of WNx thin films by helicon-wave-excited argon plasma with N2 seeding
出版年份 2021 全文链接
标题
Sputter deposition of WNx thin films by helicon-wave-excited argon plasma with N2 seeding
作者
关键词
Tungsten nitride thin films, Helicon-wave-excited plasma sputtering, N, 2, seeeding, Crystalline phase transition, Hardness, Thermal stability
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 410, Issue -, Pages 126941
出版商
Elsevier BV
发表日期
2021-02-05
DOI
10.1016/j.surfcoat.2021.126941
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Microstructures and properties of novel nanocomposite WNx coatings deposited by reactive magnetron sputtering
- (2020) Yang Deng et al. APPLIED SURFACE SCIENCE
- Fabrication of tungsten nitride thin films by superimposed HiPIMS and MF system: Effects of nitrogen flow rate
- (2020) Bih-Show Lou et al. SURFACE & COATINGS TECHNOLOGY
- Effect of Nitrogen Addition on Electron Density and Temperature of Cascaded Arc Argon Discharge Plasma Diagnosed by Laser Thomson Scattering
- (2019) Yong Wang et al. IEEE TRANSACTIONS ON PLASMA SCIENCE
- Deposition of thermally stable tungsten nitride thin films by reactive magnetron sputtering
- (2019) A.H. Abdelhameed et al. SURFACE & COATINGS TECHNOLOGY
- Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering
- (2017) X.X. Zhang et al. JOURNAL OF NUCLEAR MATERIALS
- Extraordinary Indentation Strain Stiffening Produces Superhard Tungsten Nitrides
- (2017) Cheng Lu et al. PHYSICAL REVIEW LETTERS
- One-Step Synthesis of Silicon Oxynitride Films Using a Steady-State and High-Flux Helicon-Wave Excited Nitrogen Plasma
- (2017) Tianyuan Huang et al. PLASMA CHEMISTRY AND PLASMA PROCESSING
- Plasma detachment in linear devices
- (2017) N Ohno PLASMA PHYSICS AND CONTROLLED FUSION
- Topologically close-packed phases: Deposition and formation mechanism of metastable β-W in thin films
- (2016) Jiaxing Liu et al. ACTA MATERIALIA
- The Development of the Material Plasma Exposure Experiment
- (2016) Juergen Rapp et al. IEEE TRANSACTIONS ON PLASMA SCIENCE
- High magnetic field helicon plasma discharge for plasma-wall interaction studies
- (2016) TianYuan Huang et al. Science China-Physics Mechanics & Astronomy
- Cubic β -WN x layers: Growth and properties vs N-to-W ratio
- (2016) B.D. Ozsdolay et al. SURFACE & COATINGS TECHNOLOGY
- Thermal stability studies of tungsten nitride thin films
- (2016) Shahid Anwar et al. SURFACE ENGINEERING
- Deuterium retention in tungsten films after different heat treatments
- (2015) P. Wang et al. JOURNAL OF NUCLEAR MATERIALS
- Interaction of deuterium plasma with sputter-deposited tungsten nitride films
- (2015) L. Gao et al. NUCLEAR FUSION
- Epitaxial growth and properties of cubic WN on MgO(001), MgO(111), and Al 2 O 3 (0001)
- (2015) B.D. Ozsdolay et al. THIN SOLID FILMS
- Deuterium implantation into tungsten nitride: Negligible diffusion at 300K
- (2014) L. Gao et al. JOURNAL OF NUCLEAR MATERIALS
- Overview on plasma operation with a full tungsten wall in ASDEX Upgrade
- (2013) R. Neu et al. JOURNAL OF NUCLEAR MATERIALS
- First nitrogen-seeding experiments in JET with the ITER-like Wall
- (2013) M. Oberkofler et al. JOURNAL OF NUCLEAR MATERIALS
- Design and characterization of the Magnetized Plasma Interaction Experiment (MAGPIE): a new source for plasma–material interaction studies
- (2012) Boyd D Blackwell et al. PLASMA SOURCES SCIENCE & TECHNOLOGY
- Sputtering yields for low-energy Ar+- and Ne+-ion bombardment
- (2012) Z. Somogyvári et al. VACUUM
- Deposition of tungsten nitride thin films by plasma focus device at different axial and angular positions
- (2011) M.T. Hosseinnejad et al. APPLIED SURFACE SCIENCE
- Sputtering of tungsten by N+and N2+ions: investigations of molecular effects
- (2011) K Dobes et al. PHYSICA SCRIPTA
- Quantification of the deuterium ion fluxes from a plasma source
- (2011) A Manhard et al. PLASMA SOURCES SCIENCE & TECHNOLOGY
- Nitrogen and neon retention in plasma-facing materials
- (2010) M. Rubel et al. JOURNAL OF NUCLEAR MATERIALS
- Interaction of nitrogen plasmas with tungsten
- (2010) K. Schmid et al. NUCLEAR FUSION
- Divertor power load feedback with nitrogen seeding in ASDEX Upgrade
- (2010) A Kallenbach et al. PLASMA PHYSICS AND CONTROLLED FUSION
- Growth, stress and hardness of reactively sputtered tungsten nitride thin films
- (2010) M. Wen et al. SURFACE & COATINGS TECHNOLOGY
- Structure, mechanical properties and tribology of W–N and W–O coatings
- (2009) T. Polcar et al. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
- Characterization of sputtered tungsten nitride film and its application to Cu electroless plating
- (2007) Zenglin Wang et al. MICROELECTRONIC ENGINEERING
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