Deposition of thermally stable tungsten nitride thin films by reactive magnetron sputtering

Published 2019 View Full Article

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Title
Deposition of thermally stable tungsten nitride thin films by reactive magnetron sputtering
Authors
Keywords
Tungsten nitride, Thermal stability, Magnetron sputtering, Decomposition, Nitrogen release
Journal
SURFACE & COATINGS TECHNOLOGY
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-07-31
DOI
10.1016/j.surfcoat.2019.07.046

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