One-Step Synthesis of Silicon Oxynitride Films Using a Steady-State and High-Flux Helicon-Wave Excited Nitrogen Plasma

Surface passivation of boron emitters on n-type c-Si solar cells using silicon dioxide and a PECVD silicon oxynitride stack

(2016) Nagarajan Balaji et al.   RSC Advances

Spectroscopic diagnosis of an atmospheric-pressure waveguide-based microwave N2–Ar plasma torch

(2015) Shou-Zhe Li et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Compatibility study of thin passivation layers with hydrazine for silicon-based MEMS microthruster

(2012) Pijus Kundu et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Electrical, optical and structural investigation of plasma-enhanced chemical-vapor-deposited amorphous silicon oxynitride films for solar cell applications

(2012) Nils Brinkmann et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Characterization of Random Telegraph Signal Noise of High-Performance p-MOSFETs With a High-$k$ Dielectric/Metal Gate

(2011) Hyuk-Min Kwon et al.   IEEE ELECTRON DEVICE LETTERS

Optical and structural properties of silicon oxynitride deposited by plasma enhanced chemical vapor deposition

(2010) J. Dupuis et al.   THIN SOLID FILMS

Structural and morphological studies on SiOxNy thin films

(2008) D. Criado et al.   JOURNAL OF NON-CRYSTALLINE SOLIDS