Growth, stress and hardness of reactively sputtered tungsten nitride thin films

Published 2010 View Full Article

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Title
Growth, stress and hardness of reactively sputtered tungsten nitride thin films
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue 7, Pages 1953-1961
Publisher
Elsevier BV
Online
2010-08-26
DOI
10.1016/j.surfcoat.2010.08.082

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