Fabrication of tungsten nitride thin films by superimposed HiPIMS and MF system: Effects of nitrogen flow rate

Published 2020 View Full Article

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Title
Fabrication of tungsten nitride thin films by superimposed HiPIMS and MF system: Effects of nitrogen flow rate
Authors
Keywords
High-power impulse magnetron sputtering, Mid-frequency, Superimposed HiPIMS-MF, Tungsten nitride, Peak power density, Hysteresis
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 393, Issue -, Pages 125743
Publisher
Elsevier BV
Online
2020-04-06
DOI
10.1016/j.surfcoat.2020.125743

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