Boron carbide thin films deposited by RF-PECVD and PLD technique: A comparative study based on structure, optical properties, and residual stress
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Title
Boron carbide thin films deposited by RF-PECVD and PLD technique: A comparative study based on structure, optical properties, and residual stress
Authors
Keywords
PECVD, PLD, XPS, Optical properties, Residual stress calculation
Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 258, Issue -, Pages 123860
Publisher
Elsevier BV
Online
2020-09-29
DOI
10.1016/j.matchemphys.2020.123860
References
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