Effect of self-bias on the elemental composition and neutron absorption of boron carbide films deposited by RF plasma enhanced CVD

Title
Effect of self-bias on the elemental composition and neutron absorption of boron carbide films deposited by RF plasma enhanced CVD
Authors
Keywords
Carbides, Plasma-assisted CVD, XPS, FTIR
Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 182, Issue -, Pages 62-71
Publisher
Elsevier BV
Online
2016-07-10
DOI
10.1016/j.matchemphys.2016.07.005

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