Properties of aluminum oxide thin films deposited by pulsed laser deposition and plasma enhanced chemical vapor deposition

Published 2007 View Full Article

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Title
Properties of aluminum oxide thin films deposited by pulsed laser deposition and plasma enhanced chemical vapor deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 6, Pages 1290-1296
Publisher
Elsevier BV
Online
2007-06-08
DOI
10.1016/j.tsf.2007.05.064

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