Chemical states of carbon in amorphous boron carbide thin films deposited by radio frequency magnetron sputtering

Published 2010 View Full Article

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Title
Chemical states of carbon in amorphous boron carbide thin films deposited by radio frequency magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 1, Pages 164-168
Publisher
Elsevier BV
Online
2010-07-27
DOI
10.1016/j.tsf.2010.07.090

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