Article
Materials Science, Multidisciplinary
Alexander Rogozhin, Andrey Miakonkikh, Elizaveta Smirnova, Andrey Lomov, Sergey Simakin, Konstantin Rudenko
Summary: Ruthenium thin films were successfully deposited using plasma-enhanced atomic layer deposition technology and characterized, showing that the film growth mechanism is dependent on the substrate temperature.
Article
Materials Science, Multidisciplinary
Zhijun Su, Xiaohua Jie, Wenfang Li, Zhongmiao Liao, Yingchun Li, Wen Zhu
Summary: Diamond-like carbon (DLC) films were deposited on 316L stainless steel using hybrid physical vapor deposition (PVD)/plasma-enhanced chemical vapor deposition (PECVD) process with an auxiliary anode-layer ion source at different C2H2 flow rates. The addition of Ti/TiN/TiCN interlayer deposited by high-power impulse magnetron sputtering (HiPIMS) significantly improved the hardness, tribological properties, and interfacial bonding of a-C:H films. The a-C:H film prepared at 80 sccm C2H2 showed the highest hardness, H/E, and H3/E2, and the Ti/TiN/TiCN layer enhanced the wear resistance of the a-C:H film.
Article
Materials Science, Coatings & Films
Yue Shen, Ming Wen, Yanting Xu, Sixie Li
Summary: In this study, Ru targets were prepared using two different Ru powders, and Ru films were deposited on SiO2/Si(100) substrates at various temperatures. The microstructures and electrical properties of the Ru targets and Ru films were investigated. The results showed that Ru targets with a more uniform microstructure had lower resistivity, and Ru films deposited using these targets had better crystallization, deposition rate, grain size, and surface roughness.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2023)
Review
Physics, Applied
Teresa de los Arcos, Peter Awakowicz, Jan Benedikt, Beatrix Biskup, Marc Boeke, Nils Boysen, Rahel Buschhaus, Rainer Dahlmann, Anjana Devi, Tobias Gergs, Jonathan Jenderny, Achim von Keudell, Thomas D. Kuehne, Simon Kusmierz, Hendrik Mueller, Thomas Mussenbrock, Jan Trieschmann, David Zanders, Frederik Zysk, Guido Grundmeier
Summary: This feature article presents recent findings on plasma/polymer interactions and nucleation of ultra-thin plasma films on polymeric substrates. By analyzing the plasma volume and plasma/substrate interfaces, as well as studying plasma surface chemistry, a better understanding of plasma activation of polymeric substrates and thin film nucleation and growth is achieved.
PLASMA PROCESSES AND POLYMERS
(2023)
Article
Chemistry, Physical
Beya Ouertani, Habib Boughzala, Bertrand Theys, Hatem Ezzaouia
Summary: The incorporation of ruthenium into FeSe2 thin films has shown significant improvement in optical and electrical properties, making them promising for photovoltaic applications. The alloyed films exhibited N-type conductivity with high absorption coefficients and desired band gap values. The use of ruthenium as an alloying agent in FeSe2 thin films shows potential for various applications, especially in the field of photovoltaics.
JOURNAL OF ALLOYS AND COMPOUNDS
(2021)
Review
Physics, Applied
Teresa de los Arcos, Peter Awakowicz, Marc Boeke, Nils Boysen, Ralf Peter Brinkmann, Rainer Dahlmann, Anjana Devi, Denis Eremin, Jonas Franke, Tobias Gergs, Jonathan Jenderny, Efe Kemaneci, Thomas D. Kuehne, Simon Kusmierz, Thomas Mussenbrock, Jens Rubner, Jan Trieschmann, Matthias Wessling, Xiaofan Xie, David Zanders, Frederik Zysk, Guido Grundmeier
Summary: This feature article discusses the correlation between plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition thin film structures and their barrier or membrane properties. By controlling deposition parameters and substrate selection, effective diffusion barriers or films with selective permeability can be obtained. Understanding the growth and analysis of pore size distribution and pore surface chemistry of the film is crucial for understanding the transport properties of small molecules.
PLASMA PROCESSES AND POLYMERS
(2023)
Article
Energy & Fuels
Jingming Zheng, Zhenhai Yang, Linna Lu, Mengmeng Feng, Yuyan Zhi, Yiran Lin, Mingdun Liao, Yuheng Zeng, Baojie Yan, Jichun Ye
Summary: This study demonstrates the preparation of blistering-free boron-doped poly-SiCx films by plasma enhanced chemical vapor deposition (PECVD) through the incorporation of carbon and optimization of the annealing process. It is found that thick poly-Si deposited on polished c-Si substrates tends to blister, while increasing the carbon content or lowering the annealing temperature can suppress the blistering. However, the carbon content needs to be controlled to balance the passivation and contact properties.
SOLAR ENERGY MATERIALS AND SOLAR CELLS
(2022)
Article
Biochemistry & Molecular Biology
Xinglong Wang, Huiling Zhang, Xinyue Zhang, Chang Shen, Man Liu, Shanshan Liu, Yanyang Han, Tao He
Summary: This study focused on the effects of polyglycerol polymerization degree on the physical properties of alginate films. The results showed that using plasticizers with long molecular chains can improve the mechanical properties and water solubility of the films.
INTERNATIONAL JOURNAL OF BIOLOGICAL MACROMOLECULES
(2024)
Article
Materials Science, Multidisciplinary
Bart Schurink, Wesley T. E. van den Beld, Roald M. Tiggelaar, Robbert W. E. van de Kruijs, Fred Bijkerk
Summary: This research focuses on the preparation and characterization of boron thin films using various physical and chemical deposition methods. The study found that boron films realized by plasma enhanced chemical vapor deposition (PECVD) exhibit excellent corrosion resistance and low defectivity, making them suitable for micro-fabrication applications.
Article
Engineering, Chemical
Chaomeng Dai, Xiaoyi Huang, Qian Liu, Xueji You, Yanping Duan, Jixiang Li, Jiajun Hu, Yalei Zhang, Shuguang Liu, Rongbing Fu
Summary: This study investigated the potential use of ruthenium as a catalyst to activate peroxymonosulfate and mitigate triclosan pollution. The results showed that the Ru/PMS system exhibited higher oxidization capacity compared to other systems, and the Ru(III) activator had stronger activation capacity than the Ru(II) activator. Less dosage of Ru(III) and reaction time were needed in the Ru(III)/PMS system to remove the same amount of triclosan. Coexisting components in aquatic environments had different effects on the Ru(II)/PMS and Ru(III)/PMS systems. The 1O2 played a major role in the Ru/PMS systems, and triclosan could be degraded into less toxic intermediates in the Ru(III)/PMS system.
SEPARATION AND PURIFICATION TECHNOLOGY
(2024)
Article
Environmental Sciences
Roberto Camposeco, Omar Miguel, Ana E. Torres, Daniela E. Armas, Rodolfo Zanella
Summary: Ruthenium catalysts supported on TiO2 were synthesized and tested for the catalytic oxidation of C3H8. The catalytic activity and physicochemical properties of the catalysts were investigated, and the effects of ruthenium loading, particle size, and support interaction on the catalytic performance were studied. The results showed that the 2 wt. % Ru/TiO2 catalyst exhibited the highest catalytic reactivity, and the stability and reusability of the catalyst were also demonstrated.
ENVIRONMENTAL SCIENCE AND POLLUTION RESEARCH
(2023)
Article
Chemistry, Inorganic & Nuclear
Anne-Frederique M. Pecharman, Erika M. Roberts, Fedor M. Miloserdov, Victor Varela-Izquierdo, Mary F. Mahon, Michael K. Whittlesey
Summary: The addition of excess ZnMe2 to a mixture of [Ru(PPh3)(3)HCl] and IMes resulted in the formation of a bis-cyclometallated complex [Ru(IMes)(PPh3)(2)] 2 and a mono-cyclometallated Ru-Zn heterobimetallic complex [Ru(IMes)'(PPh3)(2)(ZnMe)] 3. Further reactions of these complexes with H-2, PhSiH3, pinacolborane, and CO were investigated. Compounds 1, 4, 5, and 6 were synthesized and structurally characterized.
EUROPEAN JOURNAL OF INORGANIC CHEMISTRY
(2023)
Article
Chemistry, Physical
Ru-Yang Shao, Lin-Wei Chen, Qiang-Qiang Yan, Wei-Jie Zeng, Peng Yin, Hai-Wei Liang
Summary: Contrary to previous studies on bulk metals, nanoparticles of Ru supported on carbon (Ru/C) exhibit higher electrocatalytic performance for alkaline hydrogen evolution reactions (HERs) compared to Pt supported on carbon (Pt/C). Both commercial and homemade Ru/C catalysts are even more active than most reported Ru-based materials, suggesting that Ru/C should be used as a benchmark material for evaluating the alkaline HER performance of catalysts instead of Pt/C.
ACS APPLIED ENERGY MATERIALS
(2021)
Article
Physics, Applied
S. C. Wang, E. Zoethout, M. van Kampen, T. W. Morgan
Summary: This study aims to measure the plasma-induced hydrogen uptake of Ru films, and finds that the deuterium uptake rate of the Ru film is mainly driven by the deuterium surface coverage on metallic Ru, rather than depending on the deuterium ion flux or energy.
JOURNAL OF APPLIED PHYSICS
(2022)
Article
Chemistry, Multidisciplinary
Hak-Gyeong Kim, Da-Hee Hong, Jae-Hoon Yoo, Hee-Chul Lee
Summary: In this study, HZO thin films were fabricated via plasma-enhanced atomic layer deposition, and the effects of deposition and post-annealing temperatures on the films' properties were analyzed. The results showed that specific deposition and post-annealing temperatures could improve the density and fatigue endurance of the films.
Article
Engineering, Electrical & Electronic
Sebastian Kilige, Irene Bartusseck, Marcel Junige, Volker Neumann, Johanna Reif, Christian Wenzel, Mathias Boettcher, Matthias Albert, M. Juergen Wolf, Johann W. Bartha
MICROELECTRONIC ENGINEERING
(2019)
Article
Materials Science, Ceramics
Jakub Stec, Jacek Tarasiuk, Stanislaw Nagy, Rafal Smulski, Juergen Gluch, Robert Filipek
CERAMICS INTERNATIONAL
(2019)
Article
Nanoscience & Nanotechnology
Zhongquan Liao, Yvonne Standke, Juergen Gluch, Petr Brazda, Jaromir Kopecek, Mariana Klementova, Lukas Palatinus, Ehrenfried Zschech
Article
Multidisciplinary Sciences
Izabela Zglobicka, Agnieszka Chmielewska, Emre Topal, Kristina Kutukova, Jurgen Gluch, Peter Kruger, Cathy Kilroy, Wojciech Swieszkowski, Krzysztof J. Kurzydlowski, Ehrenfried Zschech
SCIENTIFIC REPORTS
(2019)
Article
Chemistry, Multidisciplinary
Emre Topal, Harishankaran Rajendran, Izabela Zglobicka, Juergen Gluch, Zhongquan Liao, Andre Clausner, Krzysztof Jan Kurzydlowski, Ehrenfried Zschech
Article
Chemistry, Multidisciplinary
Zhongquan Liao, Yvonne Standke, Juergen Gluch, Katalin Balazsi, Onkar Pathak, Soeren Hoehn, Mathias Herrmann, Stephan Werner, Jan Dusza, Csaba Balazsi, Ehrenfried Zschech
Summary: The microstructure and fracture mechanism of composites with different levels of graphene content were investigated. Higher graphene content was found to hinder the growth of the ZrO2 phase. Cracks tended to bypass ceramic phases in composites with 30 wt.% MLG, while they propagated through the ceramic/MLG interface in composites with low graphene content.
Article
Materials Science, Coatings & Films
Matthew B. E. Griffiths, Zachary S. Dubrawski, Peter G. Gordon, Marcel Junige, Sean T. Barry
Summary: This survey focuses on known gold-containing chemical vapor deposition (CVD) and atomic layer deposition (ALD) precursors, collecting data on their volatilization and decomposition. A figure of merit (sigma) is used to assess thermal characteristics, with some gold ALD precursors showing high potential. Gold(I) compounds with certain oxidation states have good figures of merit, while beta -diketonates and beta -ketoiminates of gold are particularly promising with high sigma values. A potential synthetic route for these compounds may make them competitive as precursors.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2021)
Article
Materials Science, Coatings & Films
Marcel Junige, Steven M. George
Summary: The study developed an area-selective molecular layer deposition (MLD) technique for repairing RIE-eroded aC hard masks and maintaining critical dimensions.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2021)
Article
Engineering, Manufacturing
Emre Topal, Juergen Gluch, Andre Clausner, Andre Cardoso, Ehrenfried Zschech
Summary: The distribution of fillers is not uniform across the wafer, and filler sizes affect the distribution on the edge and center positions. High-resolution X-ray computed tomography (HR-XCT) provides accurate data for simulation and helps in understanding the differences in filler material properties.
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY
(2021)
Article
Engineering, Electrical & Electronic
Jendrik Silomon, Juergen Gluch, Andre Clausner, Jens Paul, Ehrenfried Zschech
Summary: A novel approach is introduced to evaluate the mechanical stability of BEoL stacks, tested on samples manufactured in different technologies. The study demonstrates that AE measurements provide a more precise insight into the damage process compared to piezo sensors with higher temporal resolution.
MICROELECTRONICS RELIABILITY
(2021)
Article
Chemistry, Multidisciplinary
Qiong Li, Juergen Gluch, Zhongquan Liao, Juliane Posseckardt, Andre Clausner, Magdalena Lepicka, Malgorzata Gradzka-Dahlke, Ehrenfried Zschech
Summary: The fossil frustules of Ellerbeckia and Melosira were studied using nano X-ray tomography, TEM, and EDS, revealing their different characteristics and heavily silicified composition. In situ micromechanical tests showed that the fracture force of both genera correlates with the dimension of the fossil frustules.
Article
Materials Science, Multidisciplinary
Matthias Krause, Johanna Sonnenberg, Frans Munnik, Jorg Grenzer, Rene Huebner, Aurelio Garcia-Valenzuela, Sibylle Gemming
Summary: CuCr2O4 thin films grown by physical vapour deposition show high phase purity and absorb light in the entire solar spectral range from 300 to 2500 nm. The energy gap of the films is found to be < 0.5 eV, and their estimated solar absorptance is 0.85.
Article
Chemistry, Analytical
Lars Thormaehlen, Dennis Seidler, Viktor Schell, Frans Munnik, Jeffrey McCord, Dirk Meyners
Summary: The functional magnetic film properties are crucial for achieving the best limit of detection in thin film-based magnetic field sensors. For sensors utilizing magnetostrictive layers, control over the chemical composition, morphology, and intrinsic stresses during film deposition is necessary to manage magnetic influences like crystallographic effects and stress anisotropies. Additionally, the thermomechanical properties of quartz can lead to undesired layer stresses and associated magnetic anisotropies, especially with increases in temperature during deposition.
Article
Microscopy
Ehrenfried Zschech, Emre Topal, Kristina Kutukova, Jurgen Gluch, Markus Loeffler, Stephan Werner, Peter Guttmann, Gerd Schneider, Zhongquan Liao, Janis Timoshenko
Summary: This study utilized multi-scale X-ray computed tomography (XCT) and transmission electron microscopy (TEM) to reveal the 3D morphology and crystalline structure of hierarchically structured electrocatalytic systems, providing important insights for the design of electrocatalysts in the future.
Article
Chemistry, Physical
Matthias Krause, Mareen Hoppe, Carlos Romero-Muniz, Alvaro Mendez, Frans Munnik, Aurelio Garcia-Valenzuela, Christian Schimpf, David Rafaja, Ramon Escobar-Galindo
Summary: The stability of transparent conductive oxide SnO2:Ta (1.25 at% Ta) thin films was studied under isothermal conditions at 650°C and 800°C in air. The elemental composition and optical spectra remained unchanged after high-temperature treatment. X-ray diffraction confirmed the preservation of a single rutile-type phase. The presence of point defects, identified as Sn vacancies and O interstitials, was observed but did not affect the material's transmittance and reflectance.
JOURNAL OF MATERIALS CHEMISTRY A
(2023)
