Tuning the properties of a complex disordered material: Full factorial investigation of PECVD-grown amorphous hydrogenated boron carbide

Title
Tuning the properties of a complex disordered material: Full factorial investigation of PECVD-grown amorphous hydrogenated boron carbide
Authors
Keywords
Amorphous materials, Chemical vapor deposition, Thin films, Dielectric properties
Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 173, Issue -, Pages 268-284
Publisher
Elsevier BV
Online
2016-02-25
DOI
10.1016/j.matchemphys.2016.02.013

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