Review Article: Stress in thin films and coatings: Current status, challenges, and prospects

Published 2018 View Full Article

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Title
Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 36, Issue 2, Pages 020801
Publisher
American Vacuum Society
Online
2018-03-05
DOI
10.1116/1.5011790

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