Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane

Published 2009 View Full Article

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Title
Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 1, Pages 013505
Publisher
AIP Publishing
Online
2009-07-08
DOI
10.1063/1.3157184
References
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