Highly Stable Ultrathin Carbosiloxane Films by Molecular Layer Deposition

Published 2013 View Full Article

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Title
Highly Stable Ultrathin Carbosiloxane Films by Molecular Layer Deposition
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 117, Issue 39, Pages 19967-19973
Publisher
American Chemical Society (ACS)
Online
2013-09-20
DOI
10.1021/jp4058725

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