Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS

Metal–organic chemical vapor deposition of 2D van der Waals materials—The challenges and the extensive future opportunities

(2020) Do Hee Lee et al.   APL Materials

SiCxNy-based resistive and threshold switching by using single precursor plasma-enhanced atomic layer deposition

(2020) Yu-Lin Hsu et al.   APPLIED PHYSICS LETTERS

Toward a Self-Sensing Piezoresistive Pressure Sensor for All-SiC Monolithic Integration

(2020) Luke M. Middelburg et al.   IEEE SENSORS JOURNAL

Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect

(2020) Pablo Guzman et al.   MATERIALS & DESIGN

Status and prospects of plasma-assisted atomic layer deposition

(2019) Harm C. M. Knoops et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Fabrication of a Monolithic Implantable Neural Interface from Cubic Silicon Carbide

(2019) Mohammad Beygi et al.   Micromachines

Silicon Carbide Converters and MEMS Devices for High-temperature Power Electronics: A Critical Review

(2019) Xiaorui Guo et al.   Micromachines

Effect of discharge power and silicon content on optical and mechanical properties of carbon-rich amorphous silicon carbide films obtained by PECVD

(2019) Anatolii N. Lukianov et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Review: Silicon oxycarbide based materials for biomedical applications

(2019) Marcela Arango-Ospina et al.   Applied Materials Today

Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators

(2019) Luca Belsito et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook

(2019) Rafaiel A. Ovanesyan et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Understanding the Mechanism of SiC Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Developing Routes toward SiC Atomic Layer Deposition (ALD) with Density Functional Theory

(2018) Ekaterina A. Filatova et al.   ACS Applied Materials & Interfaces

Molecular Layer Deposition of a Highly Stable Silicon Oxycarbide Thin Film Using an Organic Chlorosilane and Water

(2018) Richard G. Closser et al.   ACS Applied Materials & Interfaces

A critical review of the effects of fluid dynamics on graphene growth in atmospheric pressure chemical vapor deposition

(2018) Fatin Bazilah Fauzi et al.   JOURNAL OF MATERIALS RESEARCH

Atomic layer deposition of carbon doped silicon oxide by precursor design and process tuning

(2018) Meiliang Wang et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Young's Modulus and Hardness Characteristics of In-Situ-Doped Polycrystalline 3C-SiC Thin Films Measured by Using a Nanoindenter

(2018) Gwiy-Sang Chung et al.   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Structural, optoelectronic and mechanical properties of PECVD Si-C-N films: An effect of substrate bias

(2018) A.O. Kozak et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review

(2018) Adriaan J. M. Mackus et al.   CHEMISTRY OF MATERIALS

Investigating routes toward atomic layer deposition of silicon carbide: Ab initio screening of potential silicon and carbon precursors

(2017) Ekaterina A. Filatova et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

(2017) Hyung-Ik Lee et al.   Scientific Reports

Fundamental Evaluation of Gas-Phase Elementary Reaction Models for Silicon Carbide Chemical Vapor Deposition

(2017) Yuichi Funato et al.   ECS Journal of Solid State Science and Technology

Relationships among growth mechanism, structure and morphology of PEALD TiO2films: the influence of O2plasma power, precursor chemistry and plasma exposure mode

(2016) W Chiappim et al.   NANOTECHNOLOGY

3C-Silicon Carbide Microresonators for Timing and Frequency Reference

(2016) Graham Wood et al.   Micromachines

Electrochemical Properties and Applications of Nanocrystalline, Microcrystalline, and Epitaxial Cubic Silicon Carbide Films

(2015) Hao Zhuang et al.   ACS Applied Materials & Interfaces

PECVD synthesis, optical and mechanical properties of silicon carbon nitride films

(2015) Evgeniya Ermakova et al.   APPLIED SURFACE SCIENCE

Effect of thermal annealing on the blue luminescence of amorphous silicon oxycarbide films

(2015) Zhenxu Lin et al.   JOURNAL OF NON-CRYSTALLINE SOLIDS

Nanostructured thin films based on TiO2 and/or SiC for use in photoelectrochemical cells: A review of the material characteristics, synthesis and recent applications

(2015) R.S. Pessoa et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

The formation of a dielectric SiNxCy sealing layer using an atomic layer deposition technique

(2015) Doyoung Kim et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Microstructure and electrical properties of nitrogen doped 3C–SiC thin films deposited using methyltrichlorosilane

(2015) H.K.E. Latha et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

A brief review of atomic layer deposition: from fundamentals to applications

(2014) Richard W. Johnson et al.   Materials Today

Highly Stable Ultrathin Carbosiloxane Films by Molecular Layer Deposition

(2013) Han Zhou et al.   Journal of Physical Chemistry C

Advances in silicon carbide science and technology at the micro- and nanoscales

(2013) Roya Maboudian et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview

(2013) M. A. Fraga et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

A new approach for AFM cantilever elaboration with 3C-SiC

(2012) S. Jiao et al.   MATERIALS LETTERS

Atmospheric Pressure Chemical Vapour Deposition of 3C-SiC for Silicon Thin-Film Solar Cells on Various Substrates

(2011) Kai Schillinger et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Low Stress Polycrystalline SiC Thin Films Suitable for MEMS Applications

(2011) Xiao-An Fu et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Plasma enhanced atomic layer deposition of SiNx:H and SiO2

(2011) Sean W. King   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Complementary metal-oxide semiconductor-compatible silicon carbide pressure sensors based on bulk micromachining

(2011) Wei Tang et al.   Micro & Nano Letters

Preliminary evaluation of the influence of the temperature on the performance of a piezoresistive pressure sensor based on a-SiC film

(2011) M. A. Fraga et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Effect of nitrogen content in amorphous SiCxNyOz thin films deposited by low temperature reactive magnetron co-sputtering technique

(2011) H.S. Medeiros et al.   SURFACE & COATINGS TECHNOLOGY

Tunable in situ growth of porous cubic silicon carbide thin films via methyltrichlorosilane-based chemical vapor deposition

(2009) Wei-Cheng Lien et al.   APPLIED PHYSICS LETTERS

Growth of Epitaxial 3C-SiC Films on Si(100) via Low Temperature SiC Buffer Layer

(2009) Wei-Cheng Lien et al.   CRYSTAL GROWTH & DESIGN

Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane

(2009) Fang Liu et al.   JOURNAL OF APPLIED PHYSICS

Micro‐ and nanomechanical structures for silicon carbide MEMS and NEMS

(2008) Christian A. Zorman et al.   PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS