Advances in silicon carbide science and technology at the micro- and nanoscales
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Title
Advances in silicon carbide science and technology at the micro- and nanoscales
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 5, Pages 050805
Publisher
American Vacuum Society
Online
2013-06-07
DOI
10.1116/1.4807902
References
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