Micro‐ and nanomechanical structures for silicon carbide MEMS and NEMS

Title
Micro‐ and nanomechanical structures for silicon carbide MEMS and NEMS
Authors
Keywords
-
Journal
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 245, Issue 7, Pages 1404-1424
Publisher
Wiley
Online
2008-06-11
DOI
10.1002/pssb.200844135

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