Metalorganic chemical vapor phase deposition of AlScN/GaN heterostructures
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Title
Metalorganic chemical vapor phase deposition of AlScN/GaN heterostructures
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 127, Issue 19, Pages 195704
Publisher
AIP Publishing
Online
2020-05-18
DOI
10.1063/5.0003095
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