Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications

Published 2011 View Full Article

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Title
Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications
Authors
Keywords
-
Journal
VACUUM
Volume 86, Issue 1, Pages 23-26
Publisher
Elsevier BV
Online
2011-05-01
DOI
10.1016/j.vacuum.2011.03.026

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