Temperature dependence of the crystalline quality of AlN layer grown on sapphire substrates by metalorganic chemical vapor deposition

Title
Temperature dependence of the crystalline quality of AlN layer grown on sapphire substrates by metalorganic chemical vapor deposition
Authors
Keywords
A1. Characterization, A3. Metalorganic chemical vapor deposition, B1. Nitrides, B2. Semiconducting aluminum compounds
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 414, Issue -, Pages 76-80
Publisher
Elsevier BV
Online
2014-10-14
DOI
10.1016/j.jcrysgro.2014.10.007

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