High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient
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Title
High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 105, Issue 13, Pages 133502
Publisher
AIP Publishing
Online
2014-10-01
DOI
10.1063/1.4896853
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