Metal‐Organic Chemical Vapor Deposition of Aluminum Scandium Nitride
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Title
Metal‐Organic Chemical Vapor Deposition of Aluminum Scandium Nitride
Authors
Keywords
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Journal
Physica Status Solidi-Rapid Research Letters
Volume -, Issue -, Pages 1900535
Publisher
Wiley
Online
2019-11-01
DOI
10.1002/pssr.201900535
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