Metalorganic chemical vapor phase deposition of AlScN/GaN heterostructures

标题
Metalorganic chemical vapor phase deposition of AlScN/GaN heterostructures
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 127, Issue 19, Pages 195704
出版商
AIP Publishing
发表日期
2020-05-18
DOI
10.1063/5.0003095

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