The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective

Multifunctional UV and Gas Sensors Based on Vertically Nanostructured Zinc Oxide: Volume Versus Surface Effect

(2019) Ocola et al.   SENSORS

Effect of the Density of Reactive Sites in P(S‐ r ‐MMA) Film during Al 2 O 3 Growth by Sequential Infiltration Synthesis

(2019) Federica E. Caligiore et al.   Advanced Materials Interfaces

Block-Copolymer Assisted Synthesis of All Inorganic Highly Porous Heterostructures with Highly Accessible Thermally Stable Functional Centers

(2019) Yunlong She et al.   ACS Applied Materials & Interfaces

Sequential Infiltration Synthesis of Electronic Materials: Group 13 Oxides via Metal Alkyl Precursors

(2019) Ruben Z. Waldman et al.   CHEMISTRY OF MATERIALS

Vapor Phase Infiltration of Metal Oxides into Nanoporous Polymers for Organic Solvent Separation Membranes

(2019) Emily K. McGuinness et al.   CHEMISTRY OF MATERIALS

Insight on the Sequential Vapor Infiltration Mechanisms of Trimethylaluminum with Poly(methyl methacrylate), Poly(vinylpyrrolidone), and Poly(acrylic acid)

(2019) Grant T. Hill et al.   Journal of Physical Chemistry C

Metal Oxide Heterostructure Array via Spatially Controlled–Growth within Block Copolymer Templates

(2019) Rotem Azoulay et al.   Small

Tin oxide nanostructure fabrication via sequential infiltration synthesis in block copolymer thin films

(2019) Barun K. Barick et al.   JOURNAL OF COLLOID AND INTERFACE SCIENCE

PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads

(2018) Maximilian Gebhard et al.   ACS Applied Materials & Interfaces

Elemental depth profiles and plasma etching rates of positive-tone electron beam resists after sequential infiltration synthesis of alumina

(2018) Yuki Ozaki et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Atomic Layer Deposition for Spacer Defined Double Patterning of sub-10 nm Titanium Dioxide Features

(2018) Stefano Dallorto et al.   NANOTECHNOLOGY

Vapor phase infiltration: from a bioinspired process to technologic application, a prospective review

(2018) Itxasne Azpitarte et al.   MRS Communications

Mitigating oil spills in the water column

(2018) Edward Barry et al.   Environmental Science-Water Research & Technology

Sequential Infiltration Synthesis of Al2O3 in Polyethersulfone Membranes

(2018) Ruben Z. Waldman et al.   JOM

Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition

(2018) Ashwanth Subramanian et al.   JOM

Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions

(2018) Chun Zhou   Journal of Micro-Nanolithography MEMS and MOEMS

Mechanistic understanding of tungsten oxide in-plane nanostructure growth via sequential infiltration synthesis

(2018) Jae Jin Kim et al.   Nanoscale

A physiochemical processing kinetics model for the vapor phase infiltration of polymers: measuring the energetics of precursor-polymer sorption, diffusion, and reaction

(2018) Collen Z. Leng et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Control of Micro- and Mesopores in Carbon Nanofibers and Hollow Carbon Nanofibers Derived from Cellulose Diacetate via Vapor Phase Infiltration of Diethyl Zinc

(2018) Wenyi Xie et al.   ACS Sustainable Chemistry & Engineering

Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation

(2018) Elena Cianci et al.   Advanced Materials Interfaces

Conversion of a Patterned Organic Resist into a High Performance Inorganic Hard Mask for High Resolution Pattern Transfer

(2018) Jean-François de Marneffe et al.   ACS Nano

Properties and Applications of Vapor Infiltration into Polymeric Substrates

(2018) Wade F. Ingram et al.   JOM

Sequential Infiltration Synthesis for Line Edge Roughness Mitigation of EUV Resist

(2017) Marina Baryshnikova et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Sequential Infiltration of Self-Assembled Block Copolymers: A Study by Atomic Force Microscopy

(2017) Matteo Lorenzoni et al.   Journal of Physical Chemistry C

Effect of Nanostructured Domains in Self-Assembled Block Copolymer Films on Sequential Infiltration Synthesis

(2017) Qing Peng et al.   LANGMUIR

Recent progress of atomic layer deposition on polymeric materials

(2017) Hong Chen Guo et al.   Materials Science & Engineering C-Materials for Biological Applications

Ultrahigh Elastic Strain Energy Storage in Metal-Oxide-Infiltrated Patterned Hybrid Polymer Nanocomposites

(2017) Keith J. Dusoe et al.   NANO LETTERS

Morphology visualization of P3HT:Fullerene blends by using subsurface atomic layer deposition

(2017) Stas Obuchovsky et al.   ORGANIC ELECTRONICS

Photodetectors: Extreme Carrier Depletion and Superlinear Photoconductivity in Ultrathin Parallel-Aligned ZnO Nanowire Array Photodetectors Fabricated by Infiltration Synthesis (Advanced Optical Materials 24/2017)

(2017) Chang-Yong Nam et al.   Advanced Optical Materials

Advanced oil sorbents using sequential infiltration synthesis

(2017) Edward Barry et al.   Journal of Materials Chemistry A

Efficient and controllable vapor to solid doping of the polythiophene P3HT by low temperature vapor phase infiltration

(2017) Weike Wang et al.   Journal of Materials Chemistry C

Reversible and Irreversible Reactions of Trimethylaluminum with Common Organic Functional Groups as a Model for Molecular Layer Deposition and Vapor Phase Infiltration

(2017) Fan Yang et al.   Advanced Materials Interfaces

Vapor phase infiltration (VPI) for transforming polymers into organic–inorganic hybrid materials: a critical review of current progress and future challenges

(2017) Collen Z. Leng et al.   Materials Horizons

Ozone-Based Sequential Infiltration Synthesis of Al2O3 Nanostructures in Symmetric Block Copolymer

(2016) Jacopo Frascaroli et al.   ACS Applied Materials & Interfaces

Directed Self-Assembly of Triblock Copolymer on Chemical Patterns for Sub-10-nm Nanofabrication via Solvent Annealing

(2016) Shisheng Xiong et al.   ACS Nano

Atomic Layer Deposition of Metal Fluorides Using HF–Pyridine as the Fluorine Precursor

(2016) Younghee Lee et al.   CHEMISTRY OF MATERIALS

Mechanism of Metal Oxide Deposition from Atomic Layer Deposition inside Nonreactive Polymer Matrices: Effects of Polymer Crystallinity and Temperature

(2016) Stas Obuchovsky et al.   CHEMISTRY OF MATERIALS

Investigating Sequential Vapor Infiltration Synthesis on Block-Copolymer-Templated Titania Nanoarrays

(2016) Olga M. Ishchenko et al.   Journal of Physical Chemistry C

Infiltrated Zinc Oxide in Poly(methyl methacrylate): An Atomic Cycle Growth Study

(2016) Leonidas E. Ocola et al.   Journal of Physical Chemistry C

Photoluminescence Mechanism and Photocatalytic Activity of Organic–Inorganic Hybrid Materials Formed by Sequential Vapor Infiltration

(2016) Halil I. Akyildiz et al.   LANGMUIR

Patterning at the 10 nanometer length scale using a strongly segregating block copolymer thin film and vapor phase infiltration of inorganic precursors

(2016) Jonathan W. Choi et al.   Nanoscale

Directed self-assembly of high-chi block copolymer for nano fabrication of bit patterned media via solvent annealing

(2016) Shisheng Xiong et al.   NANOTECHNOLOGY

Post-directed-self-assembly membrane fabrication forin situanalysis of block copolymer structures

(2016) J Ren et al.   NANOTECHNOLOGY

Non-native three-dimensional block copolymer morphologies

(2016) Atikur Rahman et al.   Nature Communications

Tuning the Conductivity of Polyaniline through Doping by Means of Single Precursor Vapor Phase Infiltration

(2016) Weike Wang et al.   Advanced Materials Interfaces

Characterizing the Three-Dimensional Structure of Block Copolymers via Sequential Infiltration Synthesis and Scanning Transmission Electron Tomography

(2015) Tamar Segal-Peretz et al.   ACS Nano

Sequential Infiltration Synthesis of Doped Polymer Films with Tunable Electrical Properties for Efficient Triboelectric Nanogenerator Development

(2015) Yanhao Yu et al.   ADVANCED MATERIALS

Electrical and structural properties of ZnO synthesized via infiltration of lithographically defined polymer templates

(2015) Chang-Yong Nam et al.   APPLIED PHYSICS LETTERS

Kinetics for the Sequential Infiltration Synthesis of Alumina in Poly(methyl methacrylate): An Infrared Spectroscopic Study

(2015) Mahua Biswas et al.   Journal of Physical Chemistry C

Template-polymer commensurability and directed self-assembly block copolymer lithography

(2015) Daniel F. Sunday et al.   JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS

Directing Hybrid Structures by Combining Self-Assembly of Functional Block Copolymers and Atomic Layer Deposition: A Demonstration on Hybrid Photovoltaics

(2015) Moshe Moshonov et al.   LANGMUIR

Free Volume Profiles at Polymer–Solid Interfaces Probed by Focused Slow Positron Beam

(2015) Christian Ohrt et al.   MACROMOLECULES

Transfer of self-aligned spacer patterns for single-digit nanofabrication

(2015) Gregory S Doerk et al.   NANOTECHNOLOGY

A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes

(2015) Jeffrey A. Klug et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Effect of Al 2 O 3 ALD coating and vapor infusion on the bulk mechanical response of elastic and viscoelastic polymers

(2015) Christina D. McClure et al.   SURFACE & COATINGS TECHNOLOGY

Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells

(2015) Atikur Rahman et al.   Nature Communications

Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates

(2015) Erinn C. Dandley et al.   Advanced Materials Interfaces

Phase Stabilization of Al:HfO2 Grown on InxGa1–xAs Substrates (x = 0, 0.15, 0.53) via Trimethylaluminum-Based Atomic Layer Deposition

(2014) Elena Cianci et al.   ACS Applied Materials & Interfaces

In Situ Raman Spectroscopic Study of Al-Infiltrated Spider Dragline Silk under Tensile Deformation

(2014) Seung-Mo Lee et al.   ACS Applied Materials & Interfaces

New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy

(2014) Mahua Biswas et al.   CHEMISTRY OF MATERIALS

Tuning the Tensile Strength of Cellulose through Vapor-Phase Metalation

(2014) Keith E. Gregorczyk et al.   CHEMISTRY OF MATERIALS

Effect of Polymer Microstructure on the Nucleation Behavior of Alumina via Atomic Layer Deposition

(2014) Richard P. Padbury et al.   Journal of Physical Chemistry C

Temperature-dependent reaction between trimethylaluminum and poly(methyl methacrylate) during sequential vapor infiltration: experimental and ab initio analysis

(2014) Erinn C. Dandley et al.   Journal of Materials Chemistry C

Atomic layer deposition of zinc oxide onto and into P3HT for hybrid photovoltaics

(2014) S. Obuchovsky et al.   Journal of Materials Chemistry C

Influence of Subsurface Hybrid Material Growth on the Mechanical Properties of Atomic Layer Deposited Thin Films on Polymers

(2013) Yujie Sun et al.   CHEMICAL VAPOR DEPOSITION

Room-Temperature Atomic Layer Deposition of Platinum

(2013) Adriaan J. M. Mackus et al.   CHEMISTRY OF MATERIALS

Metal ALD and pulsed CVD: Fundamental reactions and links with solution chemistry

(2013) David J.H. Emslie et al.   COORDINATION CHEMISTRY REVIEWS

Mechanisms and reactions during atomic layer deposition on polymers

(2013) Gregory N. Parsons et al.   COORDINATION CHEMISTRY REVIEWS

Hydrophilization of porous polypropylene membranes by atomic layer deposition of TiO2 for simultaneously improved permeability and selectivity

(2013) Qiang Xu et al.   JOURNAL OF MEMBRANE SCIENCE

Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures

(2012) Jovan Kamcev et al.   ACS Nano

Enhanced Lithographic Imaging Layer Meets Semiconductor Manufacturing Specification a Decade Early

(2012) Yu-Chih Tseng et al.   ADVANCED MATERIALS

Self-assembly of single dielectric nanoparticle layers and integration in polymer-based solar cells

(2012) Jonathan E. Allen et al.   APPLIED PHYSICS LETTERS

Self-Limited Reaction-Diffusion in Nanostructured Substrates: Surface Coverage Dynamics and Analytic Approximations to ALD Saturation Times

(2012) Angel Yanguas-Gil et al.   CHEMICAL VAPOR DEPOSITION

Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition

(2012) Bo Gong et al.   JOURNAL OF MATERIALS CHEMISTRY

Mesoporous Metal Oxides by Vapor Infiltration and Atomic Layer Deposition on Ordered Surfactant Polymer Films

(2012) Bo Gong et al.   LANGMUIR

Water Absorption of Poly(methyl methacrylate) Measured by Vertical Interference Microscopy

(2012) Mambaye N’Diaye et al.   LANGMUIR

Atomic pair distribution functions analysis of disordered low-Z materials

(2012) V. Petkov et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Highly ordered TiO2nanostructures by sequential vapour infiltration of block copolymer micellar films in an atomic layer deposition reactor

(2012) Jun Yin et al.   Journal of Materials Chemistry C

A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates

(2011) Qing Peng et al.   ACS Nano

An Alternative Route Towards Metal-Polymer Hybrid Materials Prepared by Vapor-Phase Processing

(2011) Seung-Mo Lee et al.   ADVANCED FUNCTIONAL MATERIALS

Atomic Layer Deposition of Osmium

(2011) Jani Hämäläinen et al.   CHEMISTRY OF MATERIALS

Sequential Vapor Infiltration of Metal Oxides into Sacrificial Polyester Fibers: Shape Replication and Controlled Porosity of Microporous/Mesoporous Oxide Monoliths

(2011) Bo Gong et al.   CHEMISTRY OF MATERIALS

Enhanced polymeric lithography resists via sequential infiltration synthesis

(2011) Yu-Chih Tseng et al.   JOURNAL OF MATERIALS CHEMISTRY

Self-Limiting Film Growth of Transparent Conducting In2O3 by Atomic Layer Deposition using Trimethylindium and Water Vapor

(2011) Do-Joong Lee et al.   Journal of Physical Chemistry C

Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis

(2011) Yu-Chih Tseng et al.   Journal of Physical Chemistry C

Initiation of atomic layer deposition of metal oxides on polymer substrates by water plasma pretreatment

(2011) E. Steven Brandt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Improved Mechanical Stability of Dried Collagen Membrane after Metal Infiltration

(2010) Seung-Mo Lee et al.   ACS Applied Materials & Interfaces

Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers

(2010) Qing Peng et al.   ADVANCED MATERIALS

Molecular Mechanisms of Aluminum Oxide Thin Film Growth on Polystyrene during Atomic Layer Deposition

(2010) Manjunath Puttaswamy et al.   CHEMISTRY-A EUROPEAN JOURNAL

In situspectroscopic ellipsometry as a versatile tool for studying atomic layer deposition

(2009) E Langereis et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Greatly Increased Toughness of Infiltrated Spider Silk

(2009) S.-M. Lee et al.   SCIENCE

Tungsten atomic layer deposition on polymers

(2007) C.A. Wilson et al.   THIN SOLID FILMS