Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition

Title
Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 22, Issue 31, Pages 15672
Publisher
Royal Society of Chemistry (RSC)
Online
2012-05-31
DOI
10.1039/c2jm32343e

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