Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition
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Title
Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 22, Issue 31, Pages 15672
Publisher
Royal Society of Chemistry (RSC)
Online
2012-05-31
DOI
10.1039/c2jm32343e
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