Molecular Mechanisms of Aluminum Oxide Thin Film Growth on Polystyrene during Atomic Layer Deposition

Published 2010 View Full Article

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Title
Molecular Mechanisms of Aluminum Oxide Thin Film Growth on Polystyrene during Atomic Layer Deposition
Authors
Keywords
-
Journal
CHEMISTRY-A EUROPEAN JOURNAL
Volume 16, Issue 47, Pages 13925-13929
Publisher
Wiley
Online
2010-11-12
DOI
10.1002/chem.201001888

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