Reversible and Irreversible Reactions of Trimethylaluminum with Common Organic Functional Groups as a Model for Molecular Layer Deposition and Vapor Phase Infiltration

Hybrid nanomaterials through molecular and atomic layer deposition: Top down, bottom up, and in-between approaches to new materials

(2016) Keith Gregorczyk et al.   PROGRESS IN MATERIALS SCIENCE

Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition

(2015) Simon D. Elliott et al.   ADVANCED MATERIALS

Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma

(2015) Sebastian Goerke et al.   APPLIED SURFACE SCIENCE

Atomic-Level Structural and Electronic Properties of Hybrid Inorganic–Organic ZnO:Hydroquinone Superlattices Fabricated by ALD/MLD

(2015) Antti J. Karttunen et al.   Journal of Physical Chemistry C

Cooperation between adsorbates accounts for the activation of atomic layer deposition reactions

(2015) Mahdi Shirazi et al.   Nanoscale

First principles study of the atomic layer deposition of alumina by TMA–H2O-process

(2015) Timo Weckman et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Organic/Inorganic Hybrid Materials: Challenges for ab Initio Methodology

(2014) Claudia Draxl et al.   ACCOUNTS OF CHEMICAL RESEARCH

Growth and Properties of Hafnicone and HfO2/Hafnicone Nanolaminate and Alloy Films Using Molecular Layer Deposition Techniques

(2014) Byoung H. Lee et al.   ACS Applied Materials & Interfaces

Effect of Reaction Mechanism on Precursor Exposure Time in Atomic Layer Deposition of Silicon Oxide and Silicon Nitride

(2014) Ciaran A. Murray et al.   ACS Applied Materials & Interfaces

Tailor-made oxide architectures attained by molecularly permeable metal-oxide organic hybrid thin films

(2014) Debabrata Sarkar et al.   CHEMICAL COMMUNICATIONS

Tuning the Tensile Strength of Cellulose through Vapor-Phase Metalation

(2014) Keith E. Gregorczyk et al.   CHEMISTRY OF MATERIALS

Organic and inorganic–organic thin film structures by molecular layer deposition: A review

(2014) Pia Sundberg et al.   Beilstein Journal of Nanotechnology

Density functional theory calculations of XPS binding energy shift for nitrogen-containing graphene-like structures

(2013) K. Artyushkova et al.   CHEMICAL COMMUNICATIONS

Molecular Layer Deposition of Zircone and ZrO2/Zircone Alloy Films: Growth and Properties

(2013) Byoung H. Lee et al.   CHEMICAL VAPOR DEPOSITION

Ultralow Thermal Conductivity of Atomic/Molecular Layer-Deposited Hybrid Organic–Inorganic Zincone Thin Films

(2013) Jun Liu et al.   NANO LETTERS

Thermoelectric characteristics of (Zn,Al)O/hydroquinone superlattices

(2013) Tommi Tynell et al.   Journal of Materials Chemistry A

Alucone Interlayers to Minimize Stress Caused by Thermal Expansion Mismatch between Al2O3 Films and Teflon Substrates

(2012) Shih-Hui Jen et al.   ACS Applied Materials & Interfaces

Transformation of Organic–Inorganic Hybrid Films Obtained by Molecular Layer Deposition to Photocatalytic Layers with Enhanced Activity

(2012) Sergey Ishchuk et al.   ACS Nano

Growth and Properties of Hybrid Organic-Inorganic Metalcone Films Using Molecular Layer Deposition Techniques

(2012) Byoung H. Lee et al.   ADVANCED FUNCTIONAL MATERIALS

ALD/MLD of novel layer-engineered Zn-based inorganic–organic hybrid thin films using heterobifunctional 4-aminophenol as an organic precursor

(2012) Anjali Sood et al.   DALTON TRANSACTIONS

Charge trapping behavior in organic–inorganic alloy films grown by molecular layer deposition from trimethylaluminum, p-phenylenediamine and water

(2012) Wenhao Zhou et al.   JOURNAL OF MATERIALS CHEMISTRY

Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al2O3 Atomic Layer Deposition

(2012) Byoung H. Lee et al.   Journal of Physical Chemistry C

Highly Conductive and Transparent Hybrid Organic–Inorganic Zincone Thin Films Using Atomic and Molecular Layer Deposition

(2012) Byunghoon Yoon et al.   Journal of Physical Chemistry C

An Alternative Route Towards Metal-Polymer Hybrid Materials Prepared by Vapor-Phase Processing

(2011) Seung-Mo Lee et al.   ADVANCED FUNCTIONAL MATERIALS

High-Performance Two-Dimensional Polydiacetylene with a Hybrid Inorganic-Organic Structure

(2011) Sangho Cho et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Layer-by-layer deposition of Ti–4,4′-oxydianiline hybrid thin films

(2011) Anjali Sood et al.   APPLIED SURFACE SCIENCE

Properties of AlN grown by plasma enhanced atomic layer deposition

(2011) Markus Bosund et al.   APPLIED SURFACE SCIENCE

Bio-hybrid organs and tissues for patient therapy: A future vision for 2030

(2011) Loredana De Bartolo et al.   CHEMICAL ENGINEERING AND PROCESSING

Metal Infiltration into Biomaterials by ALD and CVD: A Comparative Study

(2011) Seung-Mo Lee et al.   CHEMPHYSCHEM

Measuring the heat evolved from individual reaction steps in atomic layer deposition

(2011) O. Nilsen et al.   JOURNAL OF THERMAL ANALYSIS AND CALORIMETRY

Improved Mechanical Stability of Dried Collagen Membrane after Metal Infiltration

(2010) Seung-Mo Lee et al.   ACS Applied Materials & Interfaces

Formation of Organic Nanoscale Laminates and Blends by Molecular Layer Deposition

(2009) Paul W. Loscutoff et al.   ACS Nano

Chemical Infiltration during Atomic Layer Deposition: Metalation of Porphyrins as Model Substrates

(2009) Lianbing Zhang et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Molecular Layer Deposition of Hybrid Organic−Inorganic Alucone Polymer Films Using a Three-Step ABC Reaction Sequence

(2009) Byunghoon Yoon et al.   CHEMISTRY OF MATERIALS

“Zincone” Zinc Oxide−Organic Hybrid Polymer Thin Films Formed by Molecular Layer Deposition

(2009) Qing Peng et al.   CHEMISTRY OF MATERIALS

Atomic layer deposition on gram quantities of multi-walled carbon nanotubes

(2009) Andrew S Cavanagh et al.   NANOTECHNOLOGY

Greatly Increased Toughness of Infiltrated Spider Silk

(2009) S.-M. Lee et al.   SCIENCE

Atomic Layer Deposition of Metal Oxides on Pristine and Functionalized Graphene

(2008) Xinran Wang et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

XPS analysis of aluminum nitride films deposited by plasma source molecular beam epitaxy

(2008) Leland Rosenberger et al.   SURFACE AND INTERFACE ANALYSIS